AD GreenMode - Subfab energy savings solution.
Our system optimizes your subfab’s energy efficiency and reduces the CO2 footprint of your production.
In semiconductor manufacturing, the majority of energy is used to power the processes and devices in the subfab. That is why Automatisierung Dresden has developed a system which enables smart energy savings and can therefore lower CO2 emissions.
Characteristics of our system:
Supplier-independent
We are a supplier-independent partner for your individual GreenMode solution.
- Independence from equipment manufacturers
- No manufacturer-specific software lock-in
Open Source
We provide a 'service', not a proprietary product.
- Reduced time to benefit
- Scalability and integration
Retrofit
Particular attention has been paid to allow implementation of AD GreenMode in existing fabs.
Low risk
AD GreenMode is designed to avoid any additional risk to process integrity and yield.
Device interfaces
Our extensive interface libraries cover most abatements and vacuum pumps. They are based on over 30 years of experience in working with different subfabs.
IT integration
The system can be integrated into already existing IT infrastructures and serves as a part of a highly interconnected fab.
AD GreenMode was developed with a focus on being implemented in existing as well as greenfield fabs.
Our system can easily be integrated into fab infrastructures. We use existing subfab device features to realize energy savings.
Make full use of your fab’s energy saving potentials.
For a long time and in many fabs, tool level and subfab did not exchange a lot of information. This applies to signals, interfaces as well as other types of information. This barrier seems to disappear gradually in new fabs. The level of data integration and exchange leads to new manufacturing philosophies. Our system serves as an element in an IT driven fab.